To use the machine, please contact Prof. Kavan Hazeli

The EBSD (electron backscatter diffraction) system provides crystallographic information about regions of a specimen down to 20 nm (very best case). EBSD analyses determine crystal structure and orientation and are used to measure such things as crystallographic texture and determine the number and types of twins and grain boundaries. When combined with data from the EDS system and by searching databases, such as the JCPDS database, it can be used for phase identification. The combination of advanced, high-resolution imaging, elemental analysis and crystallographic mapping makes this a very powerful research tool.

PHILIPS / FEI XL 30 SFEG TMPI Sirion scanning electron microscope (SEM)

The XL30-SFEG is a high-resolution scanning electron microscope capable of resolutions better than 2 nm, magnifications over 600 kX, and operating voltages from 200 volts up to 30 kV with 1 kV and 2 kV being routine. At the lower beam potentials one can obtain excellent topographic detail and minimum charging while at the higher potentials one can get the optimum resolution and perform efficient EDS analyses. It also offers three imaging modes, each of which can be used simultaneously and blended to provide the desired image. This instrument is also fully computer controlled, making this a very easy to use system. This instrument includes an EDAX Phoenix EDS system and a TexSEM Laboratories EBSD system. The EDS (energy dispersive xray spectroscopy) system can be used for elemental analyses and is capable of detecting carbon, nitrogen and oxygen.



Source Schottky-emitter, automatic gun configuration control, optimized for the whole voltage range, 0.10 to 30 kV accelerating potential (focus compensated) and 1pA to 25 nA beam current, stable to better than 0.2% per hour.

Model: PHILIPS / FEI XL 30 SFEG TMPI Sirion scanning electron microscope (SEM)

Resolution: 1.5 nm at 10 kV or higher, 2.5 nm at 1 kV

Detectors: Electron Backscatter Diffraction (EBSD) and Energy-dispersive X-ray Spectroscopy (EDS)

Images: Images can be captured at resolutions up to 4k x 3k and saved as tiff files.

Stage: 50 mm x 50 mm X-Y travel, 360° rotation, -15° to 75° tilt (-15° to 45° for large specimens), compucentric rotation, 1 to 60 mm working distance, all five axes are under computer control

Software Windows: NT-based software with a multi-user shell. The XL NT Docu software provides image database management features.